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发明名称
METHOD AND APPARATUS FOR CONTROLLED SPRAY ETCHING
摘要
申请公布号
EP0611483(B2)
申请公布日期
2002.06.19
申请号
EP19920923362
申请日期
1992.10.30
申请人
ATOTECH USA INC. (A DELAWARE CORP.)
发明人
KETELHOHN, KARL F.G.;BALL, DONALD F.
分类号
C23F1/08;H01L21/00;H05K3/06;(IPC1-7):H01L21/00
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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