| 摘要 |
PURPOSE: A lead screw cleansing apparatus of semiconductor equipment is provided to improve a cleansing cycle by completely removing the residues in the spiral groove of the lead screw. CONSTITUTION: A lead screw cleansing apparatus comprises a first cleansing part(20) for covering a lead screw(14) from 40 to 60 percentage by connecting the first cleansing part(20) to one side of the lead screw(14) having a spiral groove(14a) with oil residues, a second cleansing part(24) for covering all the surface of the lead screw(14) by connecting the second cleansing part(24) to the first cleansing part(20) and the lead screw(14), and connection parts(22,26) for connecting or separating between the first and second cleansing parts(20,24). At this point, the contact surfaces of the first and second cleansing parts(20,24) project spiral parts respectively connected to the spiral groove(14a), thereby completely removing the residues in the spiral groove(14a).
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