| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-functional cleaning module for a plate display production apparatus which makes the use of a space in the apparatus efficiently applicable by minimizing the installation area of the apparatus. SOLUTION: In the multi-functional cleaning module for the plate display production apparatus, by the structure in which numbers of air curtains 1, an excimer ultraviolet check apparatus 2, a brush 3, a high flow velocity shower 4, and an air knife 5 are arranged continuously, various cleaning functions are applied simultaneously to one glass substrate. A cleaning apparatus using the multi-functional module is composed of a conveyance part for conveying the substrate to/from the module and the module for removing/drying contamination/foreign matter on the substrate.
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