发明名称 Method and apparatus for stacking IC devices
摘要 Disclosed is a method for stacking semiconductor chips, including positioning a first chip and manipulating a second chip to a distance above the first chip that is no greater than a selected distance, and releasing the second chip to drop into a stacked configuration on the first chip. The selected distance is such as to avoid damage to either of the chips. Embodiments are disclosed for setting the drop distance of the second chip within the selected distance.
申请公布号 US6406940(B1) 申请公布日期 2002.06.18
申请号 US20000638185 申请日期 2000.08.14
申请人 INTERMEDICS INC. 发明人 CHEN PHILIP H.
分类号 H01L21/98;(IPC1-7):H01L21/44 主分类号 H01L21/98
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