| 摘要 |
<p>An equipment skid for mounting ancillary equipment to support a semiconductor processing tool, the equipment skid comprising a plurality of equipment sections; and a service section; said ancillary equipment mounted within the equipment sections; the plurality of equipment and service sections connected to one another to allow external connections between the ancillary equipment and the semiconductor processing tool to pass within a region overlying a footprint of the service section. <IMAGE></p> |
