发明名称 CARRIER MATERIAL FOR HOLDING POLISHING WORKPIECE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a carrier material for holding a polishing workpiece of high productivity and a method of manufacturing the same, capable of dispens ing with a PP sheet process using an organic solvent in comparison with a conventional carrier material using a thermosetting resin. SOLUTION: This carrier material is composed of a layered product of plural sheets of fiber reinforced resin sheets 5, a thermoplastic resin is used as a matrix resin of the fiber reinforced resin sheets, the carrier material in which the sheet-shaped based material of the reinforcement fiber is buried in the matrix resin is molded, and a carrier 1 having teeth 2 and holding holes 3 is cut out from the carrier material. The carrier material is manufactured by inserting the thermoplastic resin film or powder among plural sheets of base materials of the reinforcement fiber, and integrally heating and pressing the same.
申请公布号 JP2002172556(A) 申请公布日期 2002.06.18
申请号 JP20000375665 申请日期 2000.12.11
申请人 DU PONT TORAY CO LTD;TOYO PLASTIC SEIKO CO LTD 发明人 TSUNODA ATSUSHI;BABA MANABU;TAGUCHI YOSHIHIRO
分类号 B24B37/27;B24B37/28;H01L21/304 主分类号 B24B37/27
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