发明名称 |
Patterned phase shift layers for wavelength-selectable vertical-cavity surface-emitting laser (vcsel) arrays |
摘要 |
A method is provided, the method comprising forming a first of n masking layers (1165) for a device (900) and forming a first of nphase-shift layers (970) for the device (900) using the first of the n masking layers (1165). The method also comprises forming a second of n masking layers (1165) for a device (900), and forming a second of n phase-shift layers (1070) for the device (900) using the second of the n masking layers (1165) and forming at least n + 1 and at most 2" different optical thicknesses for the device (900) using the n masking layers (1165) and the n phase-shift layers (1170). |
申请公布号 |
AU2019602(A) |
申请公布日期 |
2002.06.18 |
申请号 |
AU20020020196 |
申请日期 |
2001.12.05 |
申请人 |
APPLIED OPTOELECTRONICS, INC. |
发明人 |
WEN-YEN HWANG;KLAUS ALEXANDER ANSELM;JUN ZHENG;JAMES N. BAILLARGEON |
分类号 |
H01L33/10;H01S5/183;H01S5/40;H01S5/42 |
主分类号 |
H01L33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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