发明名称 |
Method of producing individual plasmas in order to create a uniform plasma for a work surface, and apparatus for producing such a plasma |
摘要 |
The invention provides apparatus having a series of individual plasma excitation devices each constituted by a wire applicator of microwave energy, having one end connected to a source for producing microwave energy and having an opposite end fitted with at least one magnetic dipole for creating at least one surface having a magnetic field that is constant and of intensity corresponding to electron cyclotron resonance, the dipole being mounted at the end of the microwave applicator in such a manner as to ensure that electrons accelerated to electron cyclotron resonance oscillate between the poles so as to create a plasma diffusion zone situated on the side of the dipole that is remote from the end of the applicator, the individual excitation devices being distributed relative to one another and in proximity with the work surface so as to create together a plasma that is uniform for the work surface.
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申请公布号 |
US6407359(B1) |
申请公布日期 |
2002.06.18 |
申请号 |
US20000631347 |
申请日期 |
2000.08.02 |
申请人 |
METAL PROCESS (SOCIETE A RESPONSABILITE LIMITEE) |
发明人 |
LAGARDE THIERRY;PELLETIER JACQUES |
分类号 |
H01L21/205;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):B23K10/00 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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