发明名称 Surface acoustic wave device
摘要 An object of the invention is to provide a SAW device having an electrode film on a lithium tantalate substrate having a cut angle approximate to 36 degree rotated Y cut, the electrode film including an aluminum single crystal film having improved power durability.The SAW device has interdigital electrodes on a substrate. The substrate is constructed of a 38 to 44 degree rotated Y cut lithium tantalate single crystal, each interdigital electrode includes a titanium film and an aluminum film formed thereon, and the aluminum film is a single crystal film which develops only spots on selected area electron diffraction analysis.
申请公布号 US6407486(B1) 申请公布日期 2002.06.18
申请号 US20000696281 申请日期 2000.10.26
申请人 TDK CORPORATION 发明人 KIMURA NORITOSHI;NAKANO MASAHIRO;SATO KATSUO
分类号 H03H3/08;H03H9/02;H03H9/145;(IPC1-7):H03H9/25 主分类号 H03H3/08
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