发明名称 |
Point of use dilution tool and method |
摘要 |
A dilution tool (100) and a method to prepare a solution by mixing of two fluids in a filter (130) to form a desired solution. Sealless pumps (141, 142) are driven by a common motor (143) to pump the fluids at a constant ratio of their respective flow rates while the flow rate of the solution varies. The conductivity or resistivity of the solution is measured with a measurement device (166) to determine the concentration.
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申请公布号 |
US6406555(B1) |
申请公布日期 |
2002.06.18 |
申请号 |
US20000495180 |
申请日期 |
2000.02.01 |
申请人 |
MOTOROLA INC. |
发明人 |
GROOTEGOED JAMES A.;VANELL JAMES F. |
分类号 |
B24B55/12;B01D37/00;B01F15/04;H01L21/306;(IPC1-7):B08B3/00 |
主分类号 |
B24B55/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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