发明名称 Point of use dilution tool and method
摘要 A dilution tool (100) and a method to prepare a solution by mixing of two fluids in a filter (130) to form a desired solution. Sealless pumps (141, 142) are driven by a common motor (143) to pump the fluids at a constant ratio of their respective flow rates while the flow rate of the solution varies. The conductivity or resistivity of the solution is measured with a measurement device (166) to determine the concentration.
申请公布号 US6406555(B1) 申请公布日期 2002.06.18
申请号 US20000495180 申请日期 2000.02.01
申请人 MOTOROLA INC. 发明人 GROOTEGOED JAMES A.;VANELL JAMES F.
分类号 B24B55/12;B01D37/00;B01F15/04;H01L21/306;(IPC1-7):B08B3/00 主分类号 B24B55/12
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