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发明名称
摘要
申请公布号
JP3293326(B2)
申请公布日期
2002.06.17
申请号
JP19940129085
申请日期
1994.06.10
申请人
发明人
分类号
H01L23/04;H01L21/56;H01L23/02;(IPC1-7):H01L21/56
主分类号
H01L23/04
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