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发明名称
VORRICHTUNG FÜR KONTAKTLOSE POSITIONS- UND VERSCHIEBUNGSMESSUNG
摘要
申请公布号
AT218700(T)
申请公布日期
2002.06.15
申请号
AT19980400519T
申请日期
1998.03.04
申请人
VISHAY S.A.
发明人
FLASSAYER, CLAUDE
分类号
G01D5/30;G01B11/00;G01D5/165;G01D5/26;H01L31/02;H01L31/16;(IPC1-7):G01D5/26
主分类号
G01D5/30
代理机构
代理人
主权项
地址
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