| 摘要 |
PROBLEM TO BE SOLVED: To provide a fixing method of a sample stage capable of fixing the sample stage as required by adjusting the position of the sample stage in the vertical direction highly accurately with a simple operation. SOLUTION: This fixing method of the sample stage is characterized by fixing liners 74a, 74b, 74c respectively on three slide packs 73a, 73b, 73c for installing the sample stage 20, screwing push pull screws 80 whose moving quantity determined by one revolution is known into tapped holes 77a, 77b, 77c formed on the positions of the sample stage corresponding to tapped holes 76 formed on two or more liners among the liners, adjusting the position of the sample stage in the vertical direction, and fixing the sample stage.
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