| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper for an optical information recording medium, by which the stamper can be formed with less defects and at low cost without damaging a minute groove pattern formed on a lower layer and having the size of an exposure beam spot diameter or below. SOLUTION: The method for manufacturing the stamper has a stage for forming a water soluble resin layer 12 on a base plate 11, a stage for forming a photoresist film 13 on the water soluble resin layer 12, a stage for subjecting the photoresist film to heat treatment, a stage for joining the base plate to a glass plate 18 and backing the base plate with the glass plate, a stage for exposing the photoresist film to a light beam 20 with a prescribed groove pattern, a stage for etching the water soluble resin layer to form a fine pattern on the water soluble resin layer after the exposed photoresist film is developed and washed, a stage for forming a conductive film on the surface of the base plate to laminate a nickel layer thereon by nickel electroforming, a stage for stripping the glass plate from the base plate, a stage for dissolving, removing and water-washing the base plate and the water soluble resin layer and a stage for manufacturing a maser stamper plate by polishing the back surface of the nickel layer and machining the inner and the outer diameters of the nickel layer.
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