发明名称 METHOD OF CORRECTING MASK AND MASK MANUFACTURED BY THIS METHOD
摘要 <p>PROBLEM TO BE SOLVED: To allow a ROM mask perform rapid and optimum correction. SOLUTION: The method of correcting the mask for a data program of a read-only memory includes a process step of selecting arbitrary data 15 on a data map 12 of the read-only memory and a process step of retrieving the data 16 at the circumference of the arbitrary data 15 and carrying out processing to add dimensional correction to the graphics corresponding to the arbitrary data 15 when specific conditions are satisfied.</p>
申请公布号 JP2002169262(A) 申请公布日期 2002.06.14
申请号 JP20000367357 申请日期 2000.12.01
申请人 TOSHIBA CORP 发明人 IWASE TAIRA
分类号 G03F1/36;G03F1/68;G11C29/08;H01L21/027;H01L27/112;(IPC1-7):G03F1/08 主分类号 G03F1/36
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