| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck excellent in property of removing an object to be attracted without lowering attracting property, and particle generation is small. SOLUTION: The set up plane 3 of the electrostatic chuck 1 is formed from an insulator ceramic that forms a dielectric layer 2, and a conducive ceramic film 7. The flatness of the set up plane 3 is made 5μm or less.</p> |
