OPTICAL DEVICE, MOLD AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An optical device, a mold and a manufacturing method thereof are provided to increase the productivity by reducing the processing time, and to improve the accuracy by decreasing the failure rate. CONSTITUTION: A mold(100) is composed of an electrically conductive thin plate(90) having the predetermined surface shape, and an electrically insulating reinforcement material(60). The electrically conductive thin plate is combined with the electrically insulating reinforcement material by anodic bonding. The electrically conductive thin plate is preferably formed out of silicon single crystalline and the electrically insulating reinforcement material is formed of oxide glass. The mold is selected partially about sol or gel material, and the optical apparatus is applied to an optical element such as diffraction grating.