OPTICAL WAVEGUIDE DEVICE AND METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent an optical circuit from breaking owing to chipping generated in the case of cutting off the optical circuit 22 formed on a quartz glass wafer substrate 21 by a dicing saw and also to prevent the optical circuit from breaking owing to growth of chipping during the use of an optical waveguide device. SOLUTION: A thin film is formed on an over clad 13 of the optical circuit wafer wherein a plurality of optical circuits 22 consisting of a core 12 and the over clad 13 are formed on the quartz glass wafer substrate 21, and the thin film side of the optical waveguide device is projected.