| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing method of semiconductor chip test data which does not increase the data volume more than necessary and can easily and quickly conduct a comparative analysis of each wafer within a lot. SOLUTION: After processing to form a plurality of semiconductor chips on each semiconductor wafer and test each semiconductor chip by a lot constituted of a plurality of semiconductor wafers, common data through each semiconductor wafer within the same lot is stored in one characteristic data file f1, and characteristic data of each semiconductor chip obtained by a test is stored in a semiconductor chip characteristic data file f2 classified by measurement terms of characteristics.
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