FIELD EMISSION COLD CATHODE, ITS MANUFACTURING METHOD AND FLAT DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a field emission cold cathode which produces stable emission characteristics without causing element breakdown over a long period by making a gate insulating layer and a gate electrode layer sufficiently flat. SOLUTION: This field emission cold cathode comprises: a CNT(carbon nano tube) layer 3 which includes a plurality of CNT laid on a glass substrate 1 and forms an emitter 3b; a gate insulating layer (9) which exposes the surface of the CNT layer 3 through openings 7 passing through both layers which are formed one after another on the CNT layer 3 and composing the gate insulating layer (9); a gate electrode layer 6. The cold cathode emits electrons from the surface of a emitter 3b when voltages are applied on the emitter 3b and on the gate electrode layer 6 respectively. The gate insulating layer (9) consists of multiple insulating-layer 9 laminated in order with more than two layers.