| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a ceramic heater for manufacturing and inspecting semiconductor which can protect a wafer from thermal shocks by reducing the unevenness in temperature in the periphery of a through hole, such as an inserting hole, vacuum suction hole, etc., is improved in the controllability of temperature control units, such as a thermocouple, temperature fuse, etc., and can uniformly cure a resin. SOLUTION: A heating element 14 is provided on or in a ceramic substrate 12. In addition, the corner sections of the inserting holes 16, recessed section 18, vacuum suction hole 20, etc., of the substrate 12 are formed in chamfered shapes.</p> |
