| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation detector assembly with a wave conversion body provided on the front and back sides of a photoelectric transducing element, improving the transmittance of light coming from the wave conversion body on the back side of the photoelectric transducing element without degradation of resolution, and a method for manufacturing it. SOLUTION: 120 is a substrate and 121 is a phosphor layer which is buried in a groove part provided in the substrate 120. 100 are sensor elements composed of a MIS-type photo sensor and TFT, which are two-dimensionally arranged in a 160μm pitch. 111 is an inorganic protection layer made of nitride film, etc., and 112 is an organic protection layer made of polyimide, etc. 113 is an insulating protection layer made of polyimide, etc., preferably in a pitch not more than half the picture element pitch, or 80μm, and preferably not more than 20μm. 130 is a phosphor layer, and 131 is a protection layer made of polymer film, etc., for protecting the phosphor layer 130. 132 is a reflection layer made of Al, etc.
|
