| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a large and thin electrostatic chuck with good thermal response property. SOLUTION: The chuck comprises a stainless steel material 1, an insulation layer 2 comprised of crystallized glass formed on the surface of the stainless steel material 1, an electrode 3 spreading with a pattern on the surface of the insulation layer 2, and a dielectric layer 4 covering the surface of the electrode 3. The substrate that mounted on the surface of the dielectric layer 4 is chucked with positive or negative electrostatic charge generated on the surface of the dielectric layer 4 by applying direct current potential to the electrode 3.</p> |
