| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope device which enables the observation of a large sized object to be tested and has a small vibration of the whole microscope device accompanying abrupt movement of stage and the revolution of revolver. SOLUTION: A mirror barrel part 22 which bends observation light from an objective lens 30 approximately in a horizontal direction and guides the same to an eyepiece section 21 is disposed on an arm part 14. One end of the arm part 14 is supported by a gate post part 12 of front side which is disposed on the base part 11 and, at the same time, another end of the arm part 14 is supported by a gate post part 13 of rear side which is disposed on the base part 11. In addition, the gate post part 12 of front side is positioned between the objective lens 30 and the eyepiece section 21 and a space part S which makes a semiconductor wafer 40 visible from the front side is formed on the gate post part 12 of front side.
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