| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring microscope device which is small in installation space and is high in degree of freedom for system selection. SOLUTION: This measuring microscope device is provided with an XY stage 23 which is disposed on a base 22 of a microscope main body 21, a column 25 which is disposed vertically on the surface of base 22, a Z stage 26 on which an observation part disposed on the upper part of the XY stage 23 is freely movably disposed in the upper and lower directions along the column 25, and detection parts 24a, 24b and 28 which detect the amounts of movement of the XY stage 23 and the Z stage 26. Therein, a signal calculating part 33 which calculate signals from the detection parts 24a, 24b and 28 and an independent electrical equipment part 32 incorporating a display part 34a which displays the calculated result therein are made to connectable at least one side of the base 22 and the column 25.
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