| 摘要 |
PROBLEM TO BE SOLVED: To enable a more even plasma processing than conventional plasma processing. SOLUTION: Monopole antennas 30 mounted oppositely on the surface of a mounting rest, which is located in a processing vessel, are consisted of a plurality of monopole antennas 30A-30D. The electromagnetic of the monopole antennas 30 are composed in order to form a circular polarization. |
