| 摘要 |
PROBLEM TO BE SOLVED: To provide equipment and a method for measuring light intensity, in which the intensity of a light being measured converging onto an array element is calculated accurately, depending on the wavelength thereof. SOLUTION: At measuring of the light intensity by means of an array element, the shift amount between the central part of a light being measured converged onto the array element and the central part of an element irradiated most intensively with the light being measured is determined. Coefficient values of each order in the approximate expression, determined by the shift and the intensity of light, are optimized by a corrective expression using the wavelength as a parameter, thus correcting the intensity of light and accurately measuring the intensity of the light.
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