发明名称 SPIN VALVE TYPE VERY LARGE MAGNETORESISTIVE HEAD, AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To suppress fluctuation in a reproducing output waveform by applying a magnetic domain control field to a spin valve type very large magnetoresistive layer to set a free magnetic layer as a signal magnetic domain while a constant dielectric breakdown withstand pressure is secured to maintain electric reliability in a spin valve type very large magnetoresistive head. SOLUTION: A spin valve type very large magnetoresistive laminate layer D1 having a trapezoidal sectional shape is formed by laminating an antiferromagnetic layer 1, a fixed magnetic layer 3, a free magnetic layer 4, and a nonmagnetic protective layer 5 on a lower insulating gasp layer 7. In this case, the etching amount of the lower insulating gap layer 7 is set equal to/lower than 10 nm, which is generated when a spin valve type giant magneto-resistance effect layer is formed on the laminate layer D1, and an angleθbetween the tangential line of the side face of the laminate layer D1 in the center of the free magnetic layer 4 in a film thickness direction and the center line of the free magnetic layer 4 is set equal to/higher than 45 deg.. Thus, the spin valve type very large magnetoresistive head capable of securing a constant dielectric breakdown withstand pressure, suppressing fluctuation in a reproducing output waveform and improving electric reliability and magnetic reliability is obtained.
申请公布号 JP2002170211(A) 申请公布日期 2002.06.14
申请号 JP20000365771 申请日期 2000.11.28
申请人 HITACHI LTD 发明人 ARASAWA MASATOSHI;TANAKA ATSUKO;MORIJIRI MAKOTO;NISHIOKA KOICHI;KOJIMA SHUICHI;KAGAWA MASAYOSHI
分类号 G01R33/09;G03F7/20;G11B5/31;G11B5/39;H01L43/08;H01L43/12;(IPC1-7):G11B5/39 主分类号 G01R33/09
代理机构 代理人
主权项
地址