| 摘要 |
PROBLEM TO BE SOLVED: To introduce a technique effective for an evaluation method and design of an evaluation substrate used for a reliability evaluation therein in order to enhance detection power for a trouble in the reliability evaluation of a semiconductor device. SOLUTION: The substrate for the evaluation classified by the each evaluation is prepared in the reliability evaluation of the semiconductor device to make a purpose in the each evaluation act effectively. An input part of the semiconductor device is utilized commonly for putting into two of H/L to make a potential difference between adjacent pins large, and the evaluation substrate is prepared while the evaluation for enhancing trouble detection by making a current flow in the semiconductor device, and the evaluation for enhancing the trouble detection by making no current flow are separated.
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