Porous structure production used for sieve or filter comprise anodizing silicon substrate to form porous silicon layer

摘要

Production of a porous structure comprises anodizing a silicon substrate (1) to form a porous silicon layer (2). An Independent claim is also included for the porous structure produced. Preferred Features: The substrate is anodized using an aqueous HF solution and applying a voltage between the substrate and an electrode or between two electrodes. The substrate is provided with a structured mask before being anodized, preferably in the edge region of the substrate.