发明名称 |
PROCESS FOR CLEANING CERAMIC ARTICLES |
摘要 |
A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a chemical stripping agent and then using a pelletized CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface. |
申请公布号 |
WO0209161(A3) |
申请公布日期 |
2002.06.13 |
申请号 |
WO2001US23047 |
申请日期 |
2001.07.23 |
申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
HAERLE, ANDREW, G. |
分类号 |
H01L21/304;B08B3/08;B08B7/00;B08B7/02;C04B41/53;C04B41/91 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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