Micro-component used in production of semiconductors comprises substrate having planar surface and micro-channel, covering plate on planar surface, electro-spraying emitter, and sample inlet gate

摘要

A micro-component (10) comprises a substrate (12) having a planar surface (14) and a micro-channel (18); a covering plate (30) on the planar surface; an electro-spraying emitter forming a section of the substrate and/or the covering plate; and a sample inlet gate in fluid communication with a line and allowing a fluid sample to be conveyed from an external source in a defined sample path. Independent claims are also included for the following: (i) the production of the micro-component; and (ii) for the ionization of a fluid sample in a spraying chamber using the micro-component. Preferred Features: The emitter has a concave or planar end surface arranged next to the sample outlet gate.