Method for improving barrier properties of refractory metals/metal nitrides with a safer alternative to silane

摘要

A barrier/liner structure (10) and method. First, a refractory metal/metal nitride layer (12) is formed over a structure (18), for example, by metal-organic CVD (MOCVD). Then, the refractory metal/metal nitride layer (12) is exposed to an organosilane, such as diethylsilane, to obtain a silicon-rich surface layer (14).