发明名称 Apparatus and method for analyzing capacitance of insulator
摘要 According to the present invention, there is provided an insulator capacitance analyzer for analyzing C-V characteristics of a first MIS structure having unknown capacitance, which includes: a capacitance structure having known capacitance and configured so as to be serially connectable to the first MIS structure; and a measuring section for measuring synthesis capacitance of the serially-connected first MIS structure and capacitance structure.
申请公布号 US2002070731(A1) 申请公布日期 2002.06.13
申请号 US20010003258 申请日期 2001.12.06
申请人 OHMINAMI NOBUYUKI 发明人 OHMINAMI NOBUYUKI
分类号 G01R31/26;G01R31/12;H01L21/66;H01L29/78;(IPC1-7):G01R31/12 主分类号 G01R31/26
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