| 摘要 |
In order to realize accurate analysis with a fluorescent X-ray analyzer characterized by being non-destructive and non-contacting, in a short period of time, there is provided a common X-ray generating source, a collimator for focusing primary X-rays, and, as an energy dispersion type X-ray detection system for analyzing fluorescent X-rays as a means of elemental analysis, an energy dispersion type detector where a sensor with a low count rate but having superior energy resolution and a sensor with poor energy resolution but having a superior count rate are juxtaposed. In a method where a detector signal with superior energy resolution is utilized as foreseeable information in quantitative analysis and then utilized in qualitative analysis and a detection signal with a superior count rate is utilized in quantitative analysis, after a latter stage comprising a preamplifier of the detector, a linear amplifier and pulse height analyzer is provided individually, and qualitative and quantitative spectral processing is carried out using a common control and computing unit.
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