| 摘要 |
A semiconductor processing system has processors (24A, 24B), standby ports (36A, 36B, 36C), a common transfer mechanism (40), and a controlling section (94). The controlling section (94) processes information by means of the residual processing time and the total transfer time while a first processor that is one of the processors (24A, 24B) is processing a first workpiece. The residual processing time is the time from the completion of the processing of the first workpiece by the first processor to its readiness for unloading the first workpiece out of the first processor. The total transfer time is the time from the unloading of one workpiece out of a first standby port that is one of the standby ports (36A, 36B, 36C) to the transfer of one workpiece to the standby position for the first processor. The controlling section (94) starts the transfer of another workpiece from the first standby port to the standby position for the first processor according to the result of information processing.
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