发明名称 |
Apparatus and method for detecting a work piece in an automatic processing apparatus |
摘要 |
A method and an apparatus for detecting the presence of a work piece in an automatic processing apparatus are described. Previously known detection devices cannot make a clear distinction between the presence and absence of the work piece under all conditions. An apparatus is therefore provided which contains an ultrasound transmitter, an ultrasound receiver and a detection device (controller). The detection as to whether a work piece is held in a holder in the processing apparatus is carried out by irradiating the holder with ultrasound waves, receiving the reflected ultrasound waves and detecting on the basis of the reflected ultrasound waves. The method can be used advantageously in particular in polishing machines for wafers, where the polishing cloth is distinguished considerably, in terms of its acoustic reflection capacity, from the wafer to be polished.
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申请公布号 |
US2002072301(A1) |
申请公布日期 |
2002.06.13 |
申请号 |
US20010962412 |
申请日期 |
2001.09.24 |
申请人 |
BRADL STEPHAN;HEITZSCH OLAF |
发明人 |
BRADL STEPHAN;HEITZSCH OLAF |
分类号 |
G01V1/00;B23Q17/00;B23Q17/22;B24B37/00;B25J9/16;H01L21/304;H01L21/67;(IPC1-7):B24B55/00 |
主分类号 |
G01V1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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