发明名称 SEAL MEMBER, AND SUBSTRATE STORAGE CONTAINER USING THE SEAL MEMBER
摘要 <p>A seal member (10) for a substrate storage container (20) disposed between the opening end part of a container body (20a) and a cover body (20b) formed of the container body (20a) having the opening end part and storing a substrate and the cover body (20b), comprising a base part (11) formed of a first material and a cover part (12) formed of a second material and covering at least a part of the base part, the cover part further comprising a seal forming part for forming a seal in contact with one of the container body and the cover body.</p>
申请公布号 WO2002047154(P1) 申请公布日期 2002.06.13
申请号 JP2001010732 申请日期 2001.12.07
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