ANISOTROPIC CONDUCTIVE SHEET AND WAFER INSPECTION DEVICE

摘要

A user terminal (21) and a design supporting site (11) are connected through a network (IN). In accordance with an instruction from the user terminal (21), the design supporting site (11) supports the work to design a gas supply unit device which is constructed by combining blocked fluid control units. The design supporting site (11) relates information on each fluid control unit to its symbol mark and stores them, and reads and connects the symbol marks in response to an instruction from the user terminal (21) through the network (IN) thereby to create a flow chart showing the relations among the units visually. On the basis of this flow chart, the design drawings, the parts list and the estimate sheets are created.