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发明名称
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A DEVICE FOR APPLYING SUCH A METHOD
摘要
申请公布号
EP0917596(B1)
申请公布日期
2002.06.12
申请号
EP19980903257
申请日期
1998.03.05
申请人
UNIPHASE OPTO HOLDINGS, INC.
发明人
VAN GEELEN, ANDRE;VAN DONGEN, TEUNIS
分类号
C23C16/44;C23C16/455;C23C16/52;C30B25/14;H01L21/205;(IPC1-7):C23C16/52
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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