METHOD FOR MANUFACTURING INTEGRATED TYPE INKJET HEAD

摘要

PURPOSE: A method for manufacturing integrated type inkjet head is provided to reduce assembly processes and improve accuracy by eliminating bonding process, while increasing yield rate of head. CONSTITUTION: A method comprises a first step of forming an actuator(7) for driving nozzle at a predetermined region of a silicon substrate; a second step of forming a positive photoresist film into a predetermined thickness at a region covering the actuator formed in the first step; a third step of forming a negative photoresist film(NPR) covering the positive photoresist film, excluding part of center region of the positive photoresist film formed in the second step; and a fourth step of melting and removing the positive photoresist film formed in the second step.