ROBOT FOR SUBSTRATE CONVEYANCE

摘要

PROBLEM TO BE SOLVED: To provide a robot for substrate conveyance capable of easily replacing an arm without replacing a robot itself. SOLUTION: This robot for substrate conveyance comprises a fixed base part 2, a swing base part 3 swingably connected to the fixed base part 2, and an arm part 4 swingably connected to the swing base part 3. The fixed base part 2 further comprises an internally installed swing base part drive motor 5 and a swing base part rotating shaft 6 rotatably installed on the upper plate 2a of the fixed base part 2 and connected to the swing base part drive motor 5. The swing base part 3 further comprises a flat swing table 18 detachably installed on the swing base part rotating shaft 6 and an arm base 19 detachably installed on the upper surface of the swing table 18 and having an arm drive motor 20. The arm part 4 further comprises a first arm 30 and a second arm 31 installed on the arm base 19 and a base plate mounting fork 32.