| 发明名称 |
Sputtering alloy films using a crescent-shaped aperture |
| 摘要 |
A method and system for producing thin film alloy by a sputtering deposition process comprising using a crescent-shaped aperture interposed between the target and substrate of a sputtering deposition system.
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| 申请公布号 |
US6402906(B1) |
申请公布日期 |
2002.06.11 |
| 申请号 |
US20000692293 |
申请日期 |
2000.10.19 |
| 申请人 |
DELPHI TECHNOLOGIES, INC. |
发明人 |
PICHULO ROBERT O.;RASMUSSEN GREGORY KELLER;MCCLANAHAN MARK RAY |
| 分类号 |
C23C14/04;C23C14/35;C23C14/54;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/04 |
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