发明名称 Formation of a surface on an optical component
摘要 A method of forming a reflecting surface on an optical component is disclosed. The method includes forming a first mask so as to protect a ridge region of a light transmitting medium. The ridge region is a region where a ridge of a waveguide will be formed. The method also includes performing a first etch of the light transmitting medium so as to form a side of the ridge. The first mask defines a profile of the side of the ridge during the first etch. The method further includes performing a second etch of the light transmitting medium so as to form the reflecting surface. The first mask defines a profile of the reflecting surface during the second etch.
申请公布号 AU1128902(A) 申请公布日期 2002.06.11
申请号 AU20020011289 申请日期 2001.09.27
申请人 LIGHTCROSS, INC 发明人 CHI WU;XIAOMING YIN
分类号 G02B6/12;G02B6/122;G02B6/125;G02B6/136 主分类号 G02B6/12
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