发明名称 Magnetic polishing fluids for polishing metal substrates
摘要 Magnetic polishing fluid compositions for polishing metal substrates containing colloidal and/or non-colloidal magnetic particles are described. The compositions contain oxidizers and, for example, oxidation inhibitors for assisting in the polishing process. Colloidal polishing particles may also be employed. The compositions are usually highly acidic. Methods for preparing the various polishing fluids compositions are described.
申请公布号 US6402978(B1) 申请公布日期 2002.06.11
申请号 US20000563919 申请日期 2000.05.04
申请人 MPM LTD. 发明人 LEVIN LUDMILA
分类号 B24B1/00;C03C19/00;C09G1/02;C09K3/14;H01F1/44;H01L21/321;(IPC1-7):H01F1/44;H01F1/02 主分类号 B24B1/00
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