Functional thin film with a mixed layer, piezoelectric device, ink jet recording head using said piezoelectric device, and ink jet printer using said recording head

摘要

The present invention is to produce a piezoelectric device with which the number of production processes can be reduced and reliability can be improved. A piezoelectric device (40) comprises one or more piezoelectric thin film layers (43) and 2 or more electrode layers (42 and 44). Mixed layers (512, 523, and 534) where the components of adjacent layers are mixed are formed between the respective layers.