| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink jet head in which an orifice of correct shape is formed in a large orifice plate and the body substrate is not damaged by etching liquid. SOLUTION: A supporting glass substrate 29 is coated with a thin film 30 in order to produce an orifice plate and applied with adhesive 31, a mask pattern is then formed thereon and etched to separate the thin film 30 for each print head. Internal stress of the thin film 30 is thereby relaxed and an orifice is made in correct shape with no distortion in the following process. Subsequently, the supporting substrate D is turned upside down and the internal structure, e.g. print elements, is attached onto a performed body substrate E. At first, the majority 29-2 of the supporting glass substrate 29 is removed by sandblasting and then the remaining part 29-1 is removed by wet etching to produce a print head body 35. Since etching is finished in a short time, the body substrate E is protected against damage due to etching liquid. Subsequently, an orifice is made.
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