COMBUSTION EXHAUST GAS TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a combustion exhaust gas treatment apparatus capable of simply and efficiently cooling and washing high temperature exhaust gas, which is discharged when harmful gas discharged from a CVD process or the like is burned and decomposed, at a low cost, capable of preventing the closure or corrosion of a combustion exhaust gas flow channel caused by a solid formed as a by-product and capable of reducing equipment. SOLUTION: This apparatus has a guide cylinder 21 connected to an exhaust gas discharge source and a temporary storage part 22 for a supplied cooling liquid. The exhaust gas inlet 21a of the guide cylinder 21 is opened upwardly and the cooling liquid outlet 22a of the temporary storage part 22 is arranged at the position surrounding the inlet 21a of the guide cylinder 21. The cooling liquid flowing out of the cooling liquid outlet 22a can flow down along the inner peripheral surfaces 21c' and 21d' of the guide cylinder 21 from the entire peripheral edge 21a' of the inlet 21a thereof. The cooling liquid film covering the inner peripheral surfaces 21c' and 21d' of the guide cylinder 21 is formed by the cooling liquid flowing down along the inner peripheral surfaces 21c' and 21d' of the guide cylinder 21.