METHOD AND APPARATUS FOR ELECTROLYTIC PLATING OF SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method and a apparatus for electrolytic plating of a substrate in which copper can be imbedded in a fine wiring pattern by using plating solution of high uniform electrodeposition property and high leveling property, the plating film thickness is substantially equal for both a wiring part and a non-wiring part, and CMP is easy. SOLUTION: A space 99 formed of the substrate W and an anode 98 disposed close to and substantially parallel to the substrate W is filled with plating solution containing metal ion and additives, and the concentration of the additive in the plating solution in the plating space 99 is changed during the plating operation.