发明名称 Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
摘要 A semiconductor wafer saw and method of using the same for dicing semiconductor wafers comprising a wafer saw including variable lateral indexing capabilities and multiple blades. The wafer saw, because of its variable indexing capabilities, can dice wafers having a plurality of differently sized semiconductor devices thereon into their respective discrete components. In addition, the wafer saw with its multiple blades, some of which may be independently laterally or vertically movable relative to other blades, can more efficiently dice silicon wafers into individual semiconductor devices.
申请公布号 US6401580(B1) 申请公布日期 2002.06.11
申请号 US20000567643 申请日期 2000.05.09
申请人 MICRON TECHNOLOGY, INC. 发明人 AKRAM SALMAN;GOCHNOUR DEREK J.;HESS MICHAEL E.;HEMBREE DAVID R.
分类号 B23P17/00;B26D3/00;B28D1/32;B28D5/02;H01L21/00;H01L21/301;H01L23/58;H01L29/00;H05K3/02;H05K3/20;H05K3/30;(IPC1-7):B26D3/00 主分类号 B23P17/00
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